Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2010.06a
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- Pages.27-27
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- 2010
Electrical and optical characteristics of porous 3C-SiC thin films with dopants
도핑량에 따른 다공성 3C-SiC 박막의 전기 및 광학적 특성
- Kim, Kan-San (University of Ulsan) ;
- Chung, Gwiy-Sang (University of Ulsan)
- Published : 2010.06.16
Abstract
This paper describes the electrical and optical characteristics of