Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2010.02a
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- Pages.450-450
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- 2010
Uniform field emission on ink-jet printed CNT emitters through oxygen trimming
- Song, Dae-Hun ;
- Yun, Ho-Gyu ;
- Han, Jong-Hun ;
- Kim, Seong-Hyeon ;
- Lee, Gyeong-Il ;
- Lee, Cheol-Seung ;
- Lee, Nae-Seong ;
- Lee, Han-Seong
- 송대훈 (전자부품연구원) ;
- 윤호규 (고려대학교 신소재공학과) ;
- 한종훈 (전자부품연구원) ;
- 김성현 (전자부품연구원) ;
- 이경일 (전자부품연구원) ;
- 이철승 (전자부품연구원) ;
- 이내성 (세종대학교 반도체공학과) ;
- 이한성 (세종대학교 반도체공학과)
- Published : 2010.02.17
Abstract
Recently, field emission emitters made by carbon nanotubes(CNTs) and ink-jet method have been extensively studied due to their low cost, little limitation of size and a high resolution. When CNT emitters are operated, a few highly protruded ones generate most of the emission currents that cause spatial nonuniformity. In this study, we applied selective oxidation to solve this problem on ink-jet printed CNT emitters. Consequently, O2 exposures to field emitting CNT arrays give rise to a permanent damage selectively on the highly emitting CNTs. In spite of turn-on field increase, emission images was showed remarkably uniform after oxygen trimming.
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