한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2009년도 제38회 동계학술대회 초록집
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- Pages.250-250
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- 2010
Random Telegraph Signals of the Scaling-down NOR Flash Cells
- An, Ho-Joong (Department of Electronics and Computer Engineering, Hanyang University) ;
- Lee, Gae-Hun (Department of Electronics and Computer Engineering, Hanyang University) ;
- Kil, Gyu-Hyun (Department of Electronics and Computer Engineering, Hanyang University) ;
- Song, Yun-Heup (Department of Electronics and Computer Engineering, Hanyang University)
- 발행 : 2010.02.17
초록
The random telegraph signal (RTS) for the NOR flash cell scaling is investigated. An innovative method to suppress the RTS, based on the device engineering, is proposed. By optimizing the channel doping profile and using the high-k tunnel dielectric, it is confirmed from three-dimensional (3-D) simulation, that the
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