Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2010.02a
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- Pages.174-174
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- 2010
Growth and characterization of molecular beam epitaxy grown GaN thin films using single source precursor with ammonia
- Chandrasekar, P.V. (Department of Materials Science and Engineering, Chungnam National University) ;
- Lim, Hyun-Chul (Department of Materials Science and Engineering, Chungnam National University) ;
- Chang, Dong-Mi (Department of Materials Science and Engineering, Chungnam National University) ;
- Ahn, Se-Yong (Department of Materials Science and Engineering, Chungnam National University) ;
- Kim, Chang-Gyoun (Korea Research Institute of Chemical Technology) ;
- Kim, Do-Jin (Department of Materials Science and Engineering, Chungnam National University)
- Published : 2010.02.17
Abstract
Gallium Nitride(GaN) attracts great attention due to their wide band gap energy (3.4eV), high thermal stability to the solid state lighting devices like LED, Laser diode, UV photo detector, spintronic devices, solar cells, sensors etc. Recently, researchers are interested in synthesis of polycrystalline and amorphous GaN which has also attracted towards optoelectronic device applications significantly. One of the alternatives to deposit GaN at low temperature is to use Single Source Molecular Percursor (SSP) which provides preformed Ga-N bonding. Moreover, our group succeeds in hybridization of SSP synthesized GaN with Single wall carbon nanotube which could be applicable in field emitting devices, hybrid LEDs and sensors. In this work, the GaN thin films were deposited on c-axis oriented sapphire substrate by MBE (Molecular Beam Epitaxy) using novel single source precursor of dimethyl gallium azido-tert-butylamine(
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