한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2009년도 제38회 동계학술대회 초록집
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- Pages.130-130
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- 2010
Micromorph Schottky Silicon Solar Cells
- Kim, Joon-Dong (Nano-Mechanical Systems Research Center, Korea Institute of Machinery and Materials (KIMM)) ;
- Han, Chang-Soo (Nano-Mechanical Systems Research Center, Korea Institute of Machinery and Materials (KIMM)) ;
- Yun, Ju-Hyung (Department of Electrical Engineering, State University of New York) ;
- Yi, Jun-Sin (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Park, Yun-Chang (Measurement and Analysis Division, National Nanofab Center (NNFC))
- 발행 : 2010.02.17
초록
Thin Si films were grown by a plasma-enhanced chemical vapor deposition (PECVD, SNTEK, Korea) system. Two different deposition condition were applied and formed a fully amorphous Si (a-Si) film and a micromorph mixing of microcrystalline Si (mc-Si) and a-Si film. Under one sun illumination, the micromorph device provided the enhanced open circuit voltage and fill factor values. It presents the fabrication of the micromorph Si film and the a-Si film by modulating a deposition condition. The performances of the Si thin film Schottky solar cells are discussed.
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