Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference (한국조명전기설비학회:학술대회논문집)
- 2009.05a
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- Pages.372-375
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- 2009
The Characteristics of Glow Discharge Plasma Diagnosis
글로우 방전 플라즈마 진단 특성
Abstract
We have studied on plasma diagnosis, characteristics of the glow discharge at the several different conditions of pressure, discharge current and such. The discharge onset voltage and onset current decreased as pressure increase, the general trend was nearly in agreement with the left regions of Paschen's curve. As normal glow discharge, discharge voltage was constant according to discharge current.
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