Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2009.02a
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- Pages.282.1-282.1
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- 2009
Effect of Multiple Radio-Frequency on Sputter Etching & Ashing in Dual Coil ICP Etcher
- Jang, Hae-Gyu (Department of Chemical Engineering, Sungkyunkwan University) ;
- Kim, Min-Shik (DMS, Semiconductor Business Division) ;
- Park, Kun-Joo (DMS, Semiconductor Business Division) ;
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Chae, Hee-Yeop
(Department of Chemical Engineering, Sungkyunkwan University)
- Published : 2009.02.11
Abstract
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