Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2009.02a
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- Pages.231.1-231.1
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- 2009
Maskless Chemical Dry Texturing of Silicon Surface using Fluorine Radicals and NO Gas
- Ahn, J.H. (School of Advanced Materials Science& Engineering, SungKyunKwan University) ;
- Park, Y.R. (School of Advanced Materials Science& Engineering, SungKyunKwan University) ;
- Kim, J.S. (School of Advanced Materials Science& Engineering, SungKyunKwan University) ;
- Lee, N.E. (School of Advanced Materials Science& Engineering, SungKyunKwan University)
- Published : 2009.02.11
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