Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2009.02a
- /
- Pages.196.1-196.1
- /
- 2009
Deposition of Zinc Oxide Thin Film Using Dielectric Barrier Discharge
- Mansur, Rakib M. (Department of Nuclear & Energy Engineering, Jeju National University) ;
- Penkov, Oleksiy V. (Department of Nuclear & Energy Engineering, Jeju National University) ;
- Plaksin, Vadim Yu. (Department of Nuclear & Energy Engineering, Jeju National University) ;
- Kim, Ji-Hun (Department of Nuclear & Energy Engineering, Jeju National University) ;
- Yun, Eun-Young (Department of Nuclear & Energy Engineering, Jeju National University) ;
- Lee, Heon-Ju (Department of Nuclear & Energy Engineering, Jeju National University)
- Published : 2009.02.11
Abstract
Keywords