Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2009.02a
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- Pages.178.2-178.2
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- 2009
Properties of low-k dielectrics of SiOCH thin film fabricated by changing BTMSM/O2 flow rates through the two dimensional correlation analysis
- Published : 2009.02.11
Abstract
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