Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2009.02a
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- Pages.177.1-177.1
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- 2009
Cu growth on hydrogen plasma treated Cu by metal organic chemical vapor deposition
- Moon, Hock-Key (Sungkyunkwan university, Advanced Materials Science and Engineering) ;
- Lee, Nae-Eung (Sungkyunkwan university, Advanced Materials Science and Engineering)
- Published : 2009.02.11
Abstract
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