Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2009.02a
- /
- Pages.107.2-107.2
- /
- 2009
TONOS (TiN-Oxide-Nitride-Oxide-Si) Flash Memory with ONO and NON Tunneling Barriers
- Jung, Myung-Ho (Department of Electronic Materials Engineering, Kwangwoon University) ;
- Kim, Kwan-Su (Department of Electronic Materials Engineering, Kwangwoon University) ;
- Park, Goon-Ho (Department of Electronic Materials Engineering, Kwangwoon University) ;
- Oh, Se-Man (Department of Electronic Materials Engineering, Kwangwoon University) ;
-
Chung, Hong-Bay
(Department of Electronic Materials Engineering, Kwangwoon University)
;
-
Lee, Young-Hie
(Department of Electronic Materials Engineering, Kwangwoon University)
;
- Jung, Jong-Wan (Department of Nano Science and Technology, Sejong University) ;
-
Cho, Won-Ju
(Department of Electronic Materials Engineering, Kwangwoon University)
- Published : 2009.02.11
Abstract
Keywords