한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2009년도 제37회 하계학술대회 초록집
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- Pages.359-359
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- 2009
Surface Morphological Evolution during Chemical Dry Etching of Crystalline Si using F radicals and NO Gas
- Ahn, J.H. (School of Advanced Materials Science& Engineering, SungKyunKwan University) ;
- Heo, W. (School of Advanced Materials Science& Engineering, SungKyunKwan University) ;
- Jung, C.R. (School of Advanced Materials Science& Engineering, SungKyunKwan University) ;
- Park, Y.R. (School of Advanced Materials Science& Engineering, SungKyunKwan University) ;
- Kim, J.S. (School of Advanced Materials Science& Engineering, SungKyunKwan University) ;
- Kwon, B.S. (School of Advanced Materials Science& Engineering, SungKyunKwan University) ;
- Lee, N.E. (School of Advanced Materials Science& Engineering, SungKyunKwan University)
- 발행 : 2009.08.19