Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2009.08a
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- Pages.242-242
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- 2009
Relation between CN radical behaviors and growth of amorphous CNx films in an RF magnetron sputtering system
- No, Gi-Min (KAIST) ;
- Choe, Si-Gyeong (KAIST) ;
- Kim, Jeong-Hyeong ;
- Yu, Sin-Jae ;
- Seong, Dae-Jin
- Published : 2009.08.19
Abstract
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