한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2009년도 제37회 하계학술대회 초록집
- /
- Pages.225-225
- /
- 2009
Characterization of Low Stress Silicon Nitride for Stacked structure application
- Na, Kyoung-Pil (ATTO.CO.,LTD.) ;
- Park, So-Yeon (ATTO.CO.,LTD.) ;
- Kwon, Young-Soo (ATTO.CO.,LTD.) ;
- Lee, Do-Hyoung (ATTO.CO.,LTD.)
- 발행 : 2009.08.19