Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2009.08a
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- Pages.225-225
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- 2009
Characterization of Low Stress Silicon Nitride for Stacked structure application
- Na, Kyoung-Pil (ATTO.CO.,LTD.) ;
- Park, So-Yeon (ATTO.CO.,LTD.) ;
- Kwon, Young-Soo (ATTO.CO.,LTD.) ;
- Lee, Do-Hyoung (ATTO.CO.,LTD.)
- Published : 2009.08.19
Abstract
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