Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2009.08a
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- Pages.216-216
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- 2009
Electrical Properties of Copper Oxide Thin Films Deposited by Atomic Layer Deposition
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Lee, Byung-Kook
(Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
- Min, Jae-Ki (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
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Lee, Sun-Sook
(Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
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Chung, Taek-Mo
(Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
- Kim, Chang-Gyoun (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
- Hwang, Jin-Ha (Department of Material Science and Engineering, Hongik University) ;
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An, Ki-Seok
(Device Materials Research Center, Korea Research Institute of Chemical Technology)
- Published : 2009.08.19
Abstract
Keywords