Electrical Properties of Copper Oxide Thin Films Deposited by Atomic Layer Deposition

• Lee, Byung-Kook (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
• Min, Jae-Ki (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
• Lee, Sun-Sook (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
• Chung, Taek-Mo (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
• Kim, Chang-Gyoun (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
• Hwang, Jin-Ha (Department of Material Science and Engineering, Hongik University) ;
• An, Ki-Seok (Device Materials Research Center, Korea Research Institute of Chemical Technology)

• Published : 2009.08.19

• PDF