Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)
- 2009.10a
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- Pages.161-162
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- 2009
Wide Measurement Range Heterodyne Interferometer Using Astigmatic Position Sensing Scheme
비점수차법이 적용된 넓은 측정범위 헤테로다인 간섭계
- Published : 2009.10.20
Abstract
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