한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2009년도 춘계학술대회 논문집
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- Pages.91-91
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- 2009
Hydrogen Gas Sensing Properties in Air on PdO Thin Films
- Kim, Yeon-Ju (Department of Materials Science and Engineering, Yonsei University) ;
- Lee, Young-Taek (NCRC (Nanomedical National Core Research Center), Yonsei University) ;
- Lee, Jun-Min (Department of Materials Science and Engineering, Yonsei University) ;
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Lee, Woo-Young
(Department of Materials Science and Engineering, Yonsei University)
- 발행 : 2009.04.03
초록
In the past decade, Pd based thin films have been studied far hydrogen gas sensors due to their high possibility for energy industry and environmental applications. In this work, we report a navel method to fabricate highly sensitive hydrogen gas sensors based on PdO thin films. The films were deposited on Si substrates in Ar and