한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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박막 증착공정으로 Si 기판위에 구현된 RFID 태그 안테나

RFID Tag Antenna on Si Substrate by Thin-film Deposition Process

  • 발행 : 2009.04.03
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초록

Small RFID tag antenna were fabricated on Si substrate and their physical and electrical properties were evaluated. With decreasing the size of tag antenna on Si substrate, small SMD-type RFID tags could be fabricated, which is very useful for PCB tracking. Firstly, tag antenna pattern and the electromagnetic properties were simulated with HFSS. The frequency was 13.56MHz, the line-width and line-gap were modeled in the range of $50{\sim}200{\mu}m$. S parameters, SRF, and Q value were calculated from geometry. When the line-width and line-gap were 100um and the loop-turn was 10, the SRF was 80MHZ and the Q value was ca. 9. When the microstrip antenna pattern of aluminum was fabricated by using DC sputtering, Vpp of ca. 1.6V was obtained when the reader-tag distance was 40mm.

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