한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2009년도 춘계학술대회 논문집
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- Pages.45-46
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- 2009
Oxidized-SiN으로 형성된 4H-SiC MOS capacitor.의 전기적 특성
Electrical properties of Metal-Oxide-Semiconductor (MOS) capacitor formed by oxidized-SiN
- Moon, Jeong-Hyun (Seoul National Univ.) ;
- Kim, Chang-Hyun (Seoul National Univ.) ;
- Lee, Do-Hyun (Seoul National Univ.) ;
- Bahng, Wook (Korea Electrotechnology Research Institute) ;
- Kim, Nam-Kyun (Korea Electrotechnology Research Institute) ;
- Kim, Hyeong-Joon (Seoul National Univ.)
- 발행 : 2009.04.03
초록
We have fabricated advanced metal-oxide-semiconductor (MOS) capacitors with thin (