Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2009.06a
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- Pages.235-235
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- 2009
Effect of a 3C-SiC buffer layer on SAW properties of AlN films
3C-SiC 버퍼층이 AlN 박막형 SAW 특성에 미치는 영향
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Hoang, Si-Hong
(University of Ulsan) ;
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Chung, Gwiy-Sang
(University of Ulsan)
- Published : 2009.06.18
Abstract
This paper describes the influence of a polycrystalline (poly) 3C-SiC buffer layer on the surface acoustic wave (SAW) properties of poly aluminum nitride (AlN) thin films by comparing the center frequency, insertion loss, the electromechanical coupling coefficient (