Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2009.06a
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- Pages.138-139
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- 2009
The Effect of Plasma Treatment on the Properties of GZO Thin Films Fabricated on Polymer Substrate
플라즈마 전처리 조건에 따른 폴리머 기판위에 증착된 GZO 박막의 특성변화
- Aeo, Woong-Joon (Department of Electronic Engineering, Chung-ju National University) ;
- Park, Seung-Beom (Department of Electronic Engineering, Chung-ju National University) ;
- Lee, Seok-Jin (Department of Electronic Engineering, Chung-ju National University) ;
- Kim, Byeong-Guk (Department of Electronic Engineering, Chung-ju National University) ;
- Lim, Dong-Gun (Department of Electronic Engineering, Chung-ju National University) ;
- Park, Jea-Hwan (Department of Electronic Engineering, Chung-ju National University)
- 어웅준 (충주대학교 전자공학과) ;
- 박승범 (충주대학교 전자공학과) ;
- 이석진 (충주대학교 전자공학과) ;
- 김병국 (충주대학교 전자공학과) ;
- 임동건 (충주대학교 전자공학과) ;
- 박재환 (충주대학교 전자공학과)
- Published : 2009.06.18
Abstract
폴리머 기판위에서 ICP-RIE 방법을 이용하여