한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2009년도 하계학술대회 논문집
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- Pages.13-13
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- 2009
플라스틱 기판위의 기계적으로 유연성을 가진 PZT 박막
Mechanically Flexible PZT thin films on Plastic Substrates
- 노종현 (성균관대학교 신소재공학부) ;
- 안종현 (성균관대학교 신소재공학부) ;
- 안정호 (성균관대학교 신소재공학부) ;
- 이내응 (성균관대학교 신소재공학부) ;
- 김상진 (삼성전기 중앙연구소 eMD Lab.) ;
- 이환수 (삼성전기 중앙연구소 eMD Lab.)
- Rho, Jong-Hyun (School of Advanced Material Science and Engineering, Sungkyunkwan Univ.) ;
- Ahn, Jong-Hyun (School of Advanced Material Science and Engineering, Sungkyunkwan Univ.) ;
- Lee, Nae-Eung (School of Advanced Material Science and Engineering, Sungkyunkwan Univ.) ;
- Ahn, Joung-Ho (School of Advanced Material Science and Engineering, Sungkyunkwan Univ.) ;
- Kim, Sang-Jin (eMD Lab. Central R&D Institute SAMSUNG ELECTRO-MECHANICS) ;
- Lee, Hwan-Soo (eMD Lab. Central R&D Institute SAMSUNG ELECTRO-MECHANICS)
- 발행 : 2009.06.18
초록
We have investigated the fabrication and properties of bendable PZT film formed on plastic substrates for the application in flexible memory. These devices used the PZT active layer formed on