Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2009.11a
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- Pages.130-130
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- 2009
Fabrication of Pd/poly 3C-SiC Schottky diode hydrogen sensors
다결정 3C-SiC 마이크로 공진기의 온도 특성
- Ryu, Kyong-Il (University of Ulsan) ;
- Chung, Gwiy-Sang (University of Ulsan)
- Published : 2009.11.12
Abstract
This paper describes the temperature characteristics of polycrystalline 3C-SiC micro resonators. The 1.2