Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

$ZrO_2$가 적용된 MIM Capacitor의 신뢰성 분석

  • 이소영 (충남대학교 전자정보통신공학과) ;
  • 조성원 (충남대학교 전자정보통신공학과) ;
  • 권혁민 (충남대학교 전자정보통신공학과) ;
  • 한인식 (충남대학교 전자정보통신공학과) ;
  • 박영석 (충남대학교 전자정보통신공학과) ;
  • 박상욱 (충남대학교 전자정보통신공학과) ;
  • 이희덕 (충남대학교 전자정보통신공학과)
  • Published : 2009.11.12
Download PDF
⟨ Previous Next ⟩

Abstract

In this paper, electrical properties in $ZrO_2$-based high-k metal MIM capacitors were studied. Linear voltage coefficient of capacitance (VCC) was 72.375 ppm/V, quadratic VCC was $174.581ppm/V^2$, temperature coefficients of capacitance was $111.01ppm/^{\circ}C$ at 100kHz and $89.497ppm/^{\circ}C$ at 1MHz, which indicate the temperature dependence of electrical parameter for MIM capacitors.

Keywords