Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Double rectangular spiral thin-film inductors implemented with NiFe magnetic cores for on-chip dc-dc converter applications

이중 나선형 NiFe 자성 박막인덕터를 이용한 원칩 DC-DC 컨버터

  • 이영애 (경북대학교 전자전기컴퓨터학부) ;
  • 김상기 (한국전자통신연구원) ;
  • 도승우 (경북대학교 전자전기컴퓨터학부) ;
  • 이용현 (경북대학교 전자전기컴퓨터학부)
  • Published : 2009.11.12
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Abstract

This paper describes a simple, on-chip CMOS compatible the thin-film inductor applied for the dc-dc converters. A fully CMOS-compatible thin-film inductor with a bottom NiFe core is integrated with the DC-DC converter circuit on the same chip. By eliminating ineffective top magnetic layer, very simple process integration was achieved. Fabricated monolithic thin film inductor showed fairly high inductance of 2.2 ${\mu}H$ and Q factor of 11.2 at 5MHz. When the DC-DC converter operated at $V_{in}=3.3V$ and 5MHz frequency, it showed output voltage $V_{out}=8.0V$, and corresponding power efficiency was 85%.

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