한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 2009년도 추계학술발표대회
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- Pages.28.2-28.2
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- 2009
Low Temperature Plasma-Enhanced Atomic Layer Deposition Cobalt
초록
Cobalt thin film was fabricated by a novel NH3-based plasma-enhanced atomic layer deposition(PE-ALD) using Co(CpAMD) precursor and