한국정보디스플레이학회:학술대회논문집
- 2009.10a
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- Pages.1453-1456
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- 2009
Transparent Sol-Gel Hybrid Dielectric Material Coatings for Low k Passivation Layer
- Yang, Seung-Cheol (Dept.of Materials Science and Engineering, KAIST) ;
- Oh, Ji-Hoon (Dept.of Materials Science and Engineering, KAIST) ;
- Kwak, Seung-Yeon (Dept.of Materials Science and Engineering, KAIST) ;
- Bae, Byeong-Soo (Dept.of Materials Science and Engineering, KAIST)
- Published : 2009.10.12
Abstract
Transparent sol-gel hybrid dielectric material (hybrimer) coating films were fabricated by spin coating and photo or thermal curing of sol-gel derived oligosiloxane resins. Hybrimer coating films are suitable as the passivation layer of TFT in AMLCD due to low dielectric constant, small loss tangent, low leakage current density, high transmittance and thermal stability.