한국정보디스플레이학회:학술대회논문집
- 2009.10a
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- Pages.1197-1199
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- 2009
Novel Method to Form Metal Electrodes by Self-Alignment and Self-Registration Processes
- Shin, Dong-Youn (Nano-Mechanical Systems Research Division, Korea Institute of Machinery and Materials)
- Published : 2009.10.12
Abstract
Self-alignment for the fabrication of printed thin film transistors has become of great interest because of the resolution and registration limits of printing technologies. In this work, self-patterning and selfregistration processes are introduced, which do not need surface energy patterning and the resulting minimum gate channel length could be down to