한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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- Pages.1193-1196
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- 2009
Fully Cu-based Gate and Source/Drain Interconnections for Ultrahigh-Definition LCDs
- Kugimiya, Toshihiro (Sputtering Target Division, KOBELCO RESEARCH INSTITUTE, INC.) ;
- Goto, Hiroshi (Electronics Research laboratory, KOBE STEEL, LTD.) ;
- Hino, Aya (Electronics Research laboratory, KOBE STEEL, LTD.) ;
- Nakai, Junichi (Electronics Research laboratory, KOBE STEEL, LTD.) ;
- Yoneda, Yoichiro (Sputtering Target Division, KOBELCO RESEARCH INSTITUTE, INC.) ;
- Kusumoto, Eisuke (Sputtering Target Division, KOBELCO RESEARCH INSTITUTE, INC.)
- 발행 : 2009.10.12
초록
Low resistivity interconnection and high-mobility channel are required to realize ultrahigh-definition LCDs such as 4k