Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2009.05a
- /
- Pages.98-98
- /
- 2009
Influence of radio frequency bias on hydrogenated nanocrystalline silicon thin film
RF 바이어스가 수소화된 나노결정실리콘 박막에 미치는 영향
- Published : 2009.05.27
Abstract
Hydrogenated nano-, microcrystalline silicon 박막(nc-,
Keywords