대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2009년도 정보 및 제어 심포지움 논문집
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- Pages.310-312
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- 2009
Dual-EKF를 이용한 헤테로다인 레이저 간섭계의 비선형 오차보정
Nonlinearity error compensation in heterodyne laser interferometer using Dual-EKF
- 발행 : 2009.05.07
초록
The heterodyne laser interferometer has been widely used in precise measurement field. However, the accuracy is limited by the nonlinearity error caused from incomplete laser sources and nonideal optical components. In this paper, we propose the Dual-EKF which estimates states and weights simultaneously to improve the resolution of heterodyne laser interferometer. As a proof, we demonstrate the effectiveness of our proposed method through experimental results.