Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)
- 2009.10a
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- Pages.324-325
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- 2009
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- 1598-2548(pISSN)
Resolution Improvement of AFM using the mechanical vibration measurement of an XY-axis VCM fine stage
XY-axis VCM fine stage 의 진동 측정을 이용한 AFM 의 분해능 향상
- Kim, Chul-Soo (GIST) ;
- Kim, Yong-Dae (LG Electronics Co.) ;
- Jeong, Jong-Kyu (GIST) ;
- Yum, Woo-Sub (GIST) ;
- Park, Kyi-Hwan (GIST)
- Published : 2009.10.29
Abstract
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