Pressure Sensor Packaging for Non-invasive Pulse Wave Measurement

비침습적 맥파 측정을 위한 압력센서 패키징에 관한 연구

  • Kim, Eun-Geun (Korea Electrotechnology Research Institute) ;
  • Nam, Ki-Chang (Korea Electrotechnology Research Institute) ;
  • Heo, Hyun (Korea Electrotechnology Research Institute) ;
  • Huh, Young (Korea Electrotechnology Research Institute)
  • Published : 2009.07.14

Abstract

In this paper, we have proposed and demonstrated a tonometry sensor array for measuring arterial pulse pressure. A sensor module consists of 7 piezoresistive pressure sensor array. Wire-bonded connection was provided between silicon chip and lead frame. PDMS(poly-dimethylsiloxane) was coated on the sensor array to protect fragile sensor while faithfully transmitting the pressure of radial artery to the sensor. Tonometric pulse pressure can be measured by this packaged sensor array that provides the pressure value versus the output voltage.

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