대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2009년도 제40회 하계학술대회
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- Pages.1513_1514
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- 2009
실리콘 이방성 습식 식각과 BCB 폴리머 접합을 이용한 기판 집적형 도파관(SIW) 기반의 차폐된 스트립선로의 제작
Fabrication of Substrate Integrated Waveguide (SIW)-based Shielded Stripline using Silicon Anisotropic Wet-Etch and BCB-based Polymer Bonding
- Bang, Yong-Seung (Seoul National University) ;
- Kim, Nam-Gon (Seoul National University) ;
- Kim, Jung-Mu (Chonbuk National University) ;
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Cheon, Chan-Gyul
(University of Seoul) ;
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Kwon, Young-Woo
(Seoul National University) ;
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Kim, Yong-Kweon
(Seoul National University)
- 발행 : 2009.07.14
초록
This paper reports on a fabrication of novel substrate integrated waveguide (SIW)-based shielded stripline applicable to the broadband transverse electromagnetic (TEM) single-mode propagation. We suggested a structure for half-SIW and half-shielded stripline, which combined through the benzocyclobutene (BCB) bonding layer. The electrical interconnection between the sidewall of anisotropic wet-etched silicon and patterned BCB layers is measured subsequent to the metalization on the side wall. The proposed SIW-based shielded stripline has great potential in terms of simple fabrication, integration with planar circuits and monolithic system fabricated on a SIW structure.
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