Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2009.07a
- /
- Pages.1505_1506
- /
- 2009
A comparative study on Q-factors of fused quartz and silicon micro cantilevers
비정질 수정과 실리콘 마이크로 캔틸레버 구조물의 Q-factor 비교 연구
- Song, Eun-Seok (School of Electrical Engineering and Computer Science, Seoul National University) ;
-
Kim, Yong-Kweon
(School of Electrical Engineering and Computer Science, Seoul National University) ;
- Baek, Chang-Wook (School of Electrical and Electronics Engineering, Chung-Ang University)
- Published : 2009.07.14
Abstract
In this paper, micro cantilevers which are made of two different materials - fused quartz and single crystalline silicon - and have similar dimensions were fabricated and their mechanical Q-factors were evaluated to compare intrinsic damping properties of those two materials. Resonant frequencies and Q-factors were measured for the cantilevers having fixed widths and thicknesses, and different lengths. The measured Q-values are in a range of 64,000 - 108,000 for fused quartz cantilevers, and 31,000 - 35,000 for silicon cantilevers, respectively. Experimental results support high Q-factors of fused quartz compared to single crystalline silicon due to its good intrinsic damping properties.
Keywords