밸브레스 연동(連動) 압전펌프의 설계 및 특성

Design of valveless type peristaltic micro-pump

Recently, there has been increased incessantly an interest in research area on micro-fluidic pump for electronic and biological applications. The proposed pump takes an unobtrusive operation into the simple displacing mechanism using peristaltic traveling waves without the physical moving valves. And, this piezopump makes up a panel type design. The ATILA simulation was performed to estimate the operating frequency of the vibrating wave mode, to optimize the design conditions of piezopump such as structure, elastic body material, piezoelectric ceramics, and to analyze the distribution of vibration displacement. The best measured value of the pumping rate is about $118{\mu}l$/min under the following parameters : 4-wave mode, 50kHz operating frequency, $200V_p$.