대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2009년도 제40회 하계학술대회
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- Pages.1248_1249
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- 2009
RF 스퍼터링법에 의한 세라믹 박막의 표면형상 및 구조
Suface Morphology and Structure of Ceramic Thin Film by RF Sputtering Method
- Kim, Jin-Sa (Chosun College University of Science & Technology) ;
- Cho, Choon-Nam (Kwangwoon University) ;
- Choi, Woon-Shick (Daibul University) ;
- Song, Min-Jong (Kwangju Health College) ;
- So, Byeong-Mun (Chonbuk University) ;
- Kim, Chung-Hyeok (Kwangwoon University)
- 발행 : 2009.07.14
초록
The
키워드