Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2008.11a
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- Pages.92-92
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- 2008
Study on In-doped ZnO films deposited by RF magnetron sputtering
RF 스퍼터링을 이용하여 증착한 In-doped ZnO 박막에 관한 연구
- Published : 2008.11.19
Abstract
ZIO(Indium-doped Zinc Oxide) 박막은 고밀도, 고순도 ZIO(
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