Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

2008.08a
/
Pages.331-331
/
2008

The Korean Vacuum Society (한국진공학회)

권호 표지

New Concept Deposition System : Growth of Amorphous and Microcrystalline Si prepared by CVD at low Temperature

노용석 (뉴파워프라즈마(주)) ;
최대규 (뉴파워프라즈마(주)) ;
명재민 (연세대학교 금속시스템공학과)

Published : 2008.08.20

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