Substrate Biasing Effect during MgO Deposition in CoFeB/MgO/CoFeB MTJs

  • Choi, G.M. (Center for Spintronics Research, KIST) ;
  • Shin, K.H. (Center for Spintronics Research, KIST) ;
  • Seo, S.A. (Semiconductor Device Lab, Samsung Electronics) ;
  • Kim, S.O. (Department of Materials Science & Engineering, KAIST) ;
  • Lim, W.C. (Department of Materials Science & Engineering, KAIST) ;
  • Lee, T.D. (Department of Materials Science & Engineering, KAIST)
  • 발행 : 2008.12.10