한국소성가공학회:학술대회논문집 (Proceedings of the Korean Society for Technology of Plasticity Conference)
- 한국소성가공학회 2008년도 추계학술대회 논문집
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- Pages.325-328
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- 2008
나노임프린트 리소그래피 기술의 연구 및 응용 동향
Trend of recent research and applications on Nanoimprint Lithography
초록
With intensive research and development to mass particular nanostructure of 10nm, Nanoimprint lithography will soon be put to practical use. This paper reviews latest research and application trend and also covers technical articles about Nanoimprint lithography technology Published since 1998, including statistical analysis of collected data(Web of Science DB) and related technical trend.