Proceedings of the Safety Management and Science Conference (대한안전경영과학회:학술대회논문집)
- 2008.11a
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- Pages.641-647
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- 2008
A Study on the Necessity for Energy Saving Techniques and Improvement of Dependability of Clean room
클린룸의 에너지 절약 기술 개발과 신뢰성 향상의 필요성에 관한 연구
Abstract
Since korea must get 5.2% reduction of green gas emission and insecurity of economic impact is on the increase due to unstable oil market, the demands of energy saving techniques are increasing. In this paper, we investigate necessity of development of enormous energy used cleanroom energy saving techniques furthermore we also investigate the adoption of dependability management system to develop the energy saving cleanroom development process.