Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2008.06a
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- Pages.835-836
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- 2008
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- 2005-8446(pISSN)
Design of 2-D nano scanner with displacement amplifier mechanism which is driven by PZT for application to scanning probe microscopy (SPM)
변위 증폭 메커니즘을 이용한 scanning probe microscopy용 PZT구동 2축 나노 스캐너 설계
- Published : 2008.06.11