Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2008.06a
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- Pages.93-94
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- 2008
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- 2005-8446(pISSN)
Vacuum level Evaluation of a Rotary Table using Air Bearings for High Vacuum Condition
공기베어링 응용 고진공 회전테이블의 진공특성 평가
- Published : 2008.06.11