Chemical Reactions in Single Precursor MOCVD Process of Nonstoichiometric AlO$_x$ Films and Their Resistance Switching Phenomena

Lee, Eun-Seok (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
Lee, Jun-Young (Department of Materials Science and Engineering, Hongik University) ;
Kim, Seok-Hwan (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
Lee, Sun-Sook (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
Hwang, Jin-Ha (Department of Materials Science and Engineering, Hongik University) ;
Chung, Taek-Mo (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
Lee, Young-Kuk (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
Kim, Chang-Gyoun (Device Materials Research Center, Korea Research Institute of Chemical Technology) ;
Lee, Nae-Eung (Department of Materials Science and Engineering, Sungkyunkwan University) ;
An, Ki-Seok (Device Materials Research Center, Korea Research Institute of Chemical Technology)