한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2008년도 제34회 동계학술대회 초록집
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- Pages.278-278
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- 2008
Characteristics of Organic-inorganic Hybrid low-k Thin Films
- Cho, S.J. (Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Bae, I.S. (Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Boo, J.H. (Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- 발행 : 2008.02.14