한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 춘계학술대회 논문집 센서 박막재료연구회 및 광주 전남지부
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- Pages.58-61
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- 2008
반응성 스퍼터링법에 의한 $TiO_2$ 박막의 구조적 및 광학적 특성
Structural and optical properties of $TiO_2$ thin film fabricated by reactive sputtering
- Yang, Hyeon-Hun (Department of Electrical Engineering, Mokpo National University) ;
- Jeong, Woon-Jo (Department of Electrical Engineering, Mokpo National University) ;
- Park, Gye-Choon (Department of Electrical Engineering, Mokpo National University)
- 발행 : 2008.04.17
초록